| 具有TiN过渡层的BCN薄膜制备与力学性能 |
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| 引用本文： | 陈向阳.具有TiN过渡层的BCN薄膜制备与力学性能[J].稀有金属材料与工程,2016,45(2):503-506. |
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| 作者姓名： | 陈向阳 |
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| 作者单位： | 安徽理工大学机械工程学院 |
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| 摘 要： | 用电弧增强磁控溅射(AEMS)装置在高速钢(W18Cr4V)和Si(100)基体上制备了具有TiN过渡层的BCN薄膜,用X射线衍射(XRD)仪和傅里叶红外光谱(FTIR)分析了薄膜的微观结构,用划痕仪测试了薄膜的结合力,用显微硬度计和销盘式摩擦磨损实验仪测试了薄膜的硬度和摩擦学性能。结果表明:本实验条件下制备的具有Ti N过渡层的BCN薄膜的硬度为23 GPa,薄膜与GCr15钢球对磨的摩擦系数为0.3,具有TiN过渡层的BCN薄膜的结合力和摩擦学性能较BCN单层薄膜有明显提高。
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| 关 键 词： | AEMS 具有TiN过渡层的BCN薄膜 力学性能 |
| 收稿时间： | 2014/3/27 0:00:00 |
| 修稿时间： | 2014/6/26 0:00:00 |
Synthesis and Mechanical Properties of BCN Thin Films with TiN Interlayer |
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| chen xiangyang.Synthesis and Mechanical Properties of BCN Thin Films with TiN Interlayer[J].Rare Metal Materials and Engineering,2016,45(2):503-506. |
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| Authors: | chen xiangyang |
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| Affiliation: | School of Mechanical Engineering, Anhui University of Science and Technology |
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| Abstract: | The BCN thin films with TiN interlayer were deposited on HSS and silicon (100) substrates by an arc enhanced reactive magnetron sputtering (AEMS). Microstructure of the thin films was characterized by meanings of XRD and FTIR. Adhersion to the sustrate of the thin films were characterized by scrach test. Hardness and tribological behavior of the thin films were explored by microhardness indenter and pin on disc tribometer. The present result shows that micro-hardness of the BCN thin films with TiN interlayer is 23GPa. Friction coefficient of the thin films against GCr15 steel balls is about 0.3, adhersion and tribological properties of the BCN thin films with TiN interlayer are obviously better than the BCN monolayer thin films. |
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| Keywords: | AEMS BCN thin films with TiN interlayer mechanical properties |
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