| 氧化钨多孔薄膜的制备及光学性质 |
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| 引用本文： | 黄志峰,徐刚,苗蕾,黄春明. 氧化钨多孔薄膜的制备及光学性质[J]. 材料科学与工程学报, 2009, 0(6) |
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| 作者姓名： | 黄志峰 徐刚 苗蕾 黄春明 |
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| 作者单位： | 中国科学院广州能源研究所可再生能源与天然气水合物重点实验室; |
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| 基金项目： | 国家高技术研究发展计划资助项目(2007AA03Z326) |
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| 摘 要： | 多孔结构可以使氧化钨薄膜的气敏、电致变色等性能得到增强,但目前多孔氧化钨薄膜的制备仍存在困难。本文采用W和Al双靶磁控溅射的方法得到了W-Al合金薄膜后,把合金薄膜浸入NaOH溶液中处理,其中的Al被腐蚀同时W被氧化,从而得到了多孔的氧化钨薄膜。利用SEM观察多孔氧化钨薄膜样品的表面形貌,用XPS分析样品中W的价态,用XRD分析样品的晶体结构,用紫外-可见-近红外分光光度计测量样品的光学性质。结果显示:制得的多孔氧化钨薄膜的平均孔径在100nm左右,呈海绵状疏松结构;薄膜中W的价态以+5价为主;薄膜属于非晶相;在可见光区域,多孔氧化钨薄膜具有较高的透过率,而在近红外区域则具有近似平直的透过率曲线。
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| 关 键 词： | 氧化钨 多孔薄膜 孔径 |
Preparation and Optical Properties of Porous Tungsten Oxide Thin Film |
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| HUANG Zhi-feng,XU Gang,MIAO Lei,HUANG Chun-ming. Preparation and Optical Properties of Porous Tungsten Oxide Thin Film[J]. Journal of Materials Science and Engineering, 2009, 0(6) |
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| Authors: | HUANG Zhi-feng XU Gang MIAO Lei HUANG Chun-ming |
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| Affiliation: | HUANG Zhi-feng,XU Gang,MIAO Lei,HUANG Chun-ming(Key Laboratory of Renewable Energy , Gas Hydrate,Guangzhou Institute of Energy Conversion,Chinese Academy of Sciences,Guangzhou 510640,China) |
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| Abstract: | Porous tungsten oxide thin film was prepared by a two-step method. Firstly,a W-Al alloy thin film was deposited on a glass substrate by magnetron co-sputtering process.Then the W-Al alloy thin film was immersed into a NaOH solution.The Al component of the alloy film was corroded and W component was oxidized,forming a porous tungsten oxide thin film.Surface morphology,valence state of W,crystal structure and optical properties of the porous tungsten oxide thin film were analyzed by SEM,XPS,XRD and UV-VIS-NIR... |
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| Keywords: | WO_x porous film pore size |
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