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直接面积法测量纳米硬度技术的研究
引用本文:周亮,姚英学. 直接面积法测量纳米硬度技术的研究[J]. 中国机械工程, 2005, 16(22): 2052-2055
作者姓名:周亮  姚英学
作者单位:哈尔滨工业大学,哈尔滨,150001
基金项目:中国科学院资助项目,教育部霍英东教育基金
摘    要:利用纳米压痕技术对单晶硅做纳米压痕试验,得到其载荷-压深曲线.用原子力显微镜测出压痕的三维形貌,结合Matlab软件,直接计算出压痕的残余面积,从而得到单晶硅的纳米硬度值.通过对直接面积法与Oliver-Pharr方法测出的硬度值进行分析比较,发现两种方法得到的硬度值都有压痕尺寸效应,但用直接面积法得到的硬度值比用Oliver-Pharr方法得到的硬度值尺寸效应更明显一些.

关 键 词:原子力显微镜  纳米压痕  硬度  直接面积法  单晶硅
文章编号:1004-132X(2005)22-2052-04
收稿时间:2005-01-18
修稿时间:2005-01-18

Research on Nanohardness Calculation Technology by Direct Area Method
Zhou Liang,Yao Yingxue. Research on Nanohardness Calculation Technology by Direct Area Method[J]. China Mechanical Engineering, 2005, 16(22): 2052-2055
Authors:Zhou Liang  Yao Yingxue
Affiliation:Harbin Institute of Technology, Harbin, 150001
Abstract:The nanoindention experiments were completed on single crystal silicon and obtained load-depth curve.Real 3-dimensional morphological images of residual indentation were obtained by atomic force microscopy(AFM),and the residual areas and hardness were calculated by combining Matlab software directly from AFM images.The comparing and analysis hardness of Oliver-Pharr method and hardness of directly area method reveal that the two hardnesses appear indentation size effect(ISE) as well in micro-nanoindentation,but the ISE of direct area method is more prominent than Oliver-Pharr method.
Keywords:atomic force microscopy  nanoidentation  hardness  direct area method  single crystal silicon  
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