A volume-perturbation approach to the problem of Rayleigh wave scattering at a rectangular groove

The problem of scattering of Rayleigh waves at a rectangular groove is addressed. Grooves are known to excite bulk waves upon scattering and, hence, are potential sources (albeit secondary) in bulk-acoustic-wave (BAW) devices. The groove is formulated as a volume perturbation of the geometry. A modal method is used, and the results of Rayleigh wave reflection as well as bulk wave radiation are obtained and compared with the results available in the literature. The method is compared with the boundary perturbation formulation. The equivalence of the boundary perturbation method and the volume perturbation method is shown.