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Formation of isolated carbon nanofibers with hot-wire CVD using nanosphere lithography as catalyst patterning technique
Authors:ZS Houweling  V Verlaan  GT ten Grotenhuis  REI Schropp
Affiliation:Utrecht University, Faculty of Science, Debye Institute for Nanomaterials Science, Nanophotonics-Physics of Devices, P.O. Box 80.000, 3508 TA Utrecht, the Netherlands
Abstract:Recently the site-density control of carbon nanotubes (CNTs) has attracted much attention as this has become critical for its many applications. To obtain an ordered array of catalyst nanoparticles with good monodispersity nanosphere lithography (NSL) is used. These nanoparticles are tested as catalyst sites in hot-wire chemical vapor deposition (HWCVD) of carbon nanostructures. Aside from using NSL also nickel (Ni) nano-islands are made by thermal annealing of a thin Ni film and tested as catalyst sites. Multiwall CNTs, isolated carbon nanofibres, and other nanostructures have been deposited using HWCVD. Tungsten filaments held at ~ 2000 °C are used to decompose a mixture of ammonia, methane and hydrogen. The structures have been characterized with Scanning Electron Microscopy, High Resolution Transmission Electron Microscopy, Raman spectroscopy and Rutherford Backscattering Spectroscopy.
Keywords:Hot-wire CVD  Carbon nanotubes  Nanosphere lithography
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