Resistance characteristics to oxidation of the metal-catalyzer for Cat-CVD

In order to obtain oxide films using catalytic chemical vapor deposition (Cat-CVD), oxidation experiments for catalyzers of Alumel, Al Chrom-O, Chromel, Hastelloy C-276, Kanthal, Kovar, Inconel-600, Inconel-601, Inconel X-750, Iron Chrome 30, Moleculoy, Monel, Ni, Nickel Chrome, Pt, SUS-304, SUS-316, Super Invar, and Ti have been carried out. The electric resistance measured for each metal heated at 900 °C, exposed for 30 min in O₂ atmosphere, have revealed that Alumel, Al Chrom-O, Chromel, Hastelloy C-276, Kanthal, Inconel-600, Inconel-601, Inconel X-750, Iron Chrome 30, Moleculoy, Ni, Nickel Chrome, Pt, SUS-304, and SUS-316 are in resistance to oxidation.