A novel patterning technique using super-hydrophobic PTFE thin films by Cat-CVD method |
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| Authors: | Michihisa Takachi Tatsuya Shimoda Hideki Matsumura |
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| Affiliation: | JAIST (Japan Advanced Institute of Science and Technology), Asahidai, Nomi-shi, Ishikawa-ken 923-1292, Japan |
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| Abstract: | Super-hydrophobic poly-tetrafluoroethylene (PTFE) films, with a water contact angle of over 160°, are formed by catalytic chemical vapor deposition (Cat-CVD) under high catalyzer temperature or pressure. Hydrophobicity of the PTFE films is maintained even after annealing up to 300 °C. We demonstrate a novel method for forming metal lines using super-hydrophobic PTFE films. Water-based functional liquid containing silver nanoparticles dropped on the patterned PTFE film localizes only on hydrophilic regions, resulting in formation of metal lines after annealing up to 150 °C. |
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| Keywords: | Super-hydrophobic Poly-tetrafluoroethylene (PTFE) Catalytic chemical vapor deposition (Cat-CVD) Metal line patterning Functional liquids |
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