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Optical characterization of BaSm2Ti4O12 thin films by spectroscopic ellipsometry |
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| Authors: | JJ Yoon YJ Kang YH Jeong |
| Affiliation: | a Nano-Optical Property Laboratory and Department of Physics, Kyung Hee University, Seoul 130-701, Republic of Korea b Korea Institute of Ceramic Engineering and Technology, Seoul, 153-801, Republic of Korea c Department of Materials Science and Engineering, Korea University, Seoul 136-701, Republic of Korea |
| Abstract: | We performed spectroscopic ellipsometric measurement to characterize BaSm2Ti4O12 (BST) thin films grown on Pt/Ti/SiO2/c-Si substrate by rf magnetron sputtering. The six BST films were prepared at various deposition temperatures and thermal annealing times. The resulting refractive indices and extinction coefficients of the BST films show only slight change by the deposition temperature but a significant change after thermal annealing, implying the importance of the post annealing process. The increase of the refractive index can be understood by the higher density of the BST films caused by the crystallization after annealing process. |
| Keywords: | Ellipsometry Dielectric function BaSm2Ti4O12 |
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