带双投影物镜和全息屏幕的投影型全息显微镜 |
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引用本文: | 徐昆贤. 带双投影物镜和全息屏幕的投影型全息显微镜[J]. 中国激光, 1987, 14(11): 667-670 |
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作者姓名: | 徐昆贤 |
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作者单位: | 上海市激光技术研究所 |
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摘 要: | 本文提出了一种可用于集成电路装配和质量控制的、带有双投影物镜和全息光学元件散射全息屏幕的投影型全息显微镜(PHM)系统。介绍了该系统的光学原理、全息散射屏幕的记录方案、系统色差的改善和投影显微系统的特性。
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收稿时间: | 1986-08-11 |
Projection type holographic microscope (PHM) with double projection objectives and a holographic screen |
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Abstract: | A projection-type holographic microscope with double projection-objectives and a holographic screen used for integrated circuits assembly and quality control is described. The optical principle of PHM, recording scheme of holographic dispersion of screen and relative parameters of PHM are discussed. |
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