| 硅谐振式压力微传感器模型与开环特性测试 |
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| 引用本文： | 王莹莹,樊尚春,邢维巍,蔡晨光.硅谐振式压力微传感器模型与开环特性测试[J].传感技术学报,2007,20(2):283-286. |
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| 作者姓名： | 王莹莹 樊尚春 邢维巍 蔡晨光 |
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| 作者单位： | 北京航空航天大学仪器科学与光电工程学院微传感技术实验室,北京,100083 |
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| 基金项目： | 国家自然科学基金，航空基础科学基金 |
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| 摘 要： | 基于谐振式硅微结构压力传感器幅、相频率特性的分析,利用北京航空航天大学微传感器实验室研制的谐振式硅微结构传感器开环测试系统的测试实验结果和Matlab实验数据处理与拟和分析计算,建立了微传感器的二阶模型.该模型排除了未知相位延迟的影响,从幅值和相位混合的测试数据中精确计算出谐振频率、品质因数以及相位特性,为闭环测试系统的研制提供了依据.
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| 关 键 词： | 谐振式 压力传感器 频率特性 模型 |
| 文章编号： | 1004-1699（2007）02-0283-04 |
| 收稿时间： | 2006-03-28 |
| 修稿时间： | 2006-04-17 |
Model and Open-loop Characteristics Test of the Silicon Resonant
Pressure Microsensor |
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| WANG Ying-ying,FAN Shang-chun,XING Wei-wei,CAI Chen-guang.Model and Open-loop Characteristics Test of the Silicon Resonant
Pressure Microsensor[J].Journal of Transduction Technology,2007,20(2):283-286. |
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| Authors: | WANG Ying-ying FAN Shang-chun XING Wei-wei CAI Chen-guang |
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| Affiliation: | School of Instrument Science & Optoelectron Engineering, Beihang University |
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| Abstract: | Based on the analysis of the magnitude and phase frequency characteristics of the resonant silicon microstructure pressure sensor, experiment investigation on the open-loop test of resonant sensors, curve fitting and data processing with Matlab, a model of the resonant silicon microsensor was described. The resonant frequency, quality factor and phase characteristic of the sensor can then be calculated without the influence of the unknown phase delay. The obtained results here are of significance to develop the closedloop system of microsensor. |
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| Keywords: | MEMS |
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