大孔径移相式CO_2激光干涉仪

叙述了已研制成功的红外移相式数字干涉仪的原理和性能，光源为ＣＯ２激光器（λ＝１０．６μｍ），该仪器光路是斐索型干涉系统，孔径为２５０ｍｍ，不确定度ＰＶ值优于λ／１３０（２σ）；也可构成泰曼球波面干涉系统。采用压电晶体驱动参考反射镜作相位调制，完成了对热释电摄像机的热电靶的温度调制。给出红外望远系统波前和光盘基片平面度实测光程差的二维等值图和三维立体图。

A Large Aperture Phase shifting CO 2 Laser Interferometer

A large aperture phase shifting infrared interferometer is developed, which uses a CO2 laser source (λ=10.6 μm) comprising of a Fizeau interferometer with the aperture reaching φ250 mm and an accuracy better than λ/100. And a Twyman spherical interferometer, using a piezoelectric transducer (PZT) to shift a reference mirror and pyroelectric vidican (PEV) as the detector, can also be formed. While phase measurement interferometry (PMI)is carried out, the temperature modulation of the PEV target is also being down. A series of software packages used to fit the wavefront and evaluate image quality are incroporated into the instrument. The testing results of IR telescope wavefront and the flatness of glass mastering discs are presented.