基于柔性衬底的磁声表面波谐振器

针对在柔性衬底上制备非晶软磁薄膜的技术难题，该文研究并制作了一种基于柔性聚酰亚胺(PI)衬底的磁声表面波(MSAW)谐振器。通过在柔性PI衬底上溅射沉积了非晶FeCoSiB磁致伸缩薄膜和ScAlN压电薄膜，光刻制备了叉指电极，并形成IDT/ScAlN/FeCoSiB/PI层状结构，成功获得了柔性MSAW谐振器。采用X线衍射(XRD)和原子力显微镜(AFM)分析了薄膜的结构和表面形貌及利用振动样品磁强计(VSM)和短路微带线法测试了FeCoSiB薄膜的静态磁性和高频磁谱特性，最后在探针台上利用矢量网络分析仪对器件进行测试，并与COMSOL仿真结果进行对比。实验结果表明，该MSAW器件有两个谐振峰，其中瑞利波出现在28.32 MHz，兰姆波出现在93.69 MHz。

Magnetic Surface Acoustic Wave Resonator Based on Flexible Substrate

In this paper,a magnetic acoustic surface wave(MSAW) resonator based on flexible polyimide (PI) substrate is studied and fabricated by solving the technique problem of preparing amorphous soft magnetic thin films on flexible substrates. By sputtering and depositing amorphous FeCoSiB magnetostrictive film and ScAlN piezoelectric film on flexible polyimide (PI) substrate, the interdigital electrode was fabricated by photolithography and the layered structure of IDT/ScAlN/FeCoSiB/PI was formed, the flexible MSAW resonator was fabricated successfully. The structure and surface morphology of the films were analyzed by X ray diffraction(XRD) and atomic force microscopy (AFM). The static and high frequency magnetic properties of FeCoSiB films were measured by VSM and short circuit microstrip method.Finally,the device is tested on the probe platform by vector network analyzer and compared with the simulation results of COMSOL.The experimental results showed that the MSAW device had two resonance peaks,of which the Rayleigh wave appears at 28.32 MHz and Lamb wave appears at 93.69 MHz.