集成铌酸锂光子器件技术的研究进展

铌酸锂单晶薄膜(LNOI)具有透光光谱宽,折射率高,二阶非线性高及压电响应大等优点，是一种重要的集成光子学基础材料。LNOI材料具有亚波长尺度的光约束和光电器件的高密度集成能力，能够实现具有更高性能、更低成本的全新器件及应用，给光通信和微波光子学带来革命性的变革。该文重点综述了LNOI的制备技术、LNOI电光调制器、LNOI声光调制器和LNOI电光频率梳的最新研究进展，简要讨论了铌酸锂光子器件在制作工艺和系统实现中面临的挑战。

Current Progress of Integrated Lithium Niobate Photonic Device Technology

Lithium niobate(LiNbO3) on insulator(LNOI) is a promising material for integrated photonics, owing to its unique properties of wide optical transparency window, high refractive index, large second order nonlinearity and large piezoelectric response. The integrated LN material, featuring sub wavelength scale light confinement and high integration of optoelectronic components, has the potential to enable higher performance, lower cost and entirely new devices and applications, and revolutionize optical communication and microwave photonics. This review focusses on the current progress of LNOI electro optic modulator, LNOI acousto optic(AO) modulator and LNOI electro optic frequency comb, and briefly discusses the challenges meeting from fabrication and system realization.