| 六硼化镧材料的化学腐蚀工艺研究 |
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| 引用本文： | 于海波, 林祖伦, 祁康成,. 六硼化镧材料的化学腐蚀工艺研究[J]. 电子器件, 2006, 29(1): 22-24 |
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| 作者姓名： | 于海波 林祖伦 祁康成 |
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| 作者单位： | 电子科技大学光电信息学院,成都,610054;电子科技大学光电信息学院,成都,610054;电子科技大学光电信息学院,成都,610054 |
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| 摘 要： | 目前,阴极发射体材料多存在逸出功大，可靠性及均匀性低，发射性能低、不能自动调节活性物质更替的速度等方面的问题．与之相比,六硼化镧既具有可恒定地维持一个活性阴极表面．同时具有高导电率和良好的热稳定性及化学稳定性，是作为阴极发射体的理想材料．而对六硼化镧的化学腐蚀在以其为阴极的阴极发射体制备工艺中起着至关重要的作用，本文简述了对材料的化学腐蚀工艺的初步研究，并得到了图形化的六硼化镧表面。
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| 关 键 词： | 硼化镧 单晶 光刻 化学腐蚀 |
| 文章编号： | 1005-9490（2006）01-0022-03 |
| 收稿时间： | 2005-06-10 |
| 修稿时间： | 2005-06-10 |
Chemical Etching Technical Research in Material of LaB_6 |
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| YU Hai-bo,LIN Zu-lun,QI Kang-cheng. Chemical Etching Technical Research in Material of LaB_6[J]. Journal of Electron Devices, 2006, 29(1): 22-24 |
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| Authors: | YU Hai-bo LIN Zu-lun QI Kang-cheng |
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| Affiliation: | School of Optic-Electronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China |
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| Abstract: | At present, the material of emitting cathode is mostly present with big escaping power,low reliability,low uniformity and emission capability. The self-regulation of their activated matter is also destitute. LaB6 , as one kind of better material, is so perfect that it is important to research its chemical etching in the arts and crafts to be used in the preparation of emitting cathode, we simply state the chemical etching technical research in material of LaB6 and have gainded graphics surface of LaB6 |
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| Keywords: | lanthanium hexabride single-crystal light chisel chemical etch |
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