| 铝过渡层沉积CVD金刚石涂层的研究 |
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| 引用本文： | 郑琳,左敦稳,徐锋,卢文壮,张旭辉,黄美健,朱良杰.铝过渡层沉积CVD金刚石涂层的研究[J].机械制造与自动化,2012,41(3):27-29,42. |
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| 作者姓名： | 郑琳 左敦稳 徐锋 卢文壮 张旭辉 黄美健 朱良杰 |
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| 作者单位： | 南京航空航天大学 抗疲劳制造与表面工程研究所,江苏南京,210016 |
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| 基金项目： | 国家自然科学基金，国家自然科学基金，南京航空航天大学2010年度研究生创新基金 |
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| 摘 要： | 使用Murakami溶液和王水预处理高钴硬质合金刀片,并用直流磁控溅射(DCS)技术在此硬质合金上溅射铝过渡层,在热丝化学气相沉积(HFCVD)设备里沉积金刚石薄膜;分析了金刚石形核机理,并利用SEM以及Raman等方法表征试样。结果表明:与未溅射过渡层的样品相比,在过渡层上的金刚石形核密度更高,金刚石颗粒尺寸更加细小。
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| 关 键 词： | 直流磁控溅射技术 铝中间层 金刚石薄膜 高钴硬质合金 |
Study of CVD diamond coating on Cemented Carbide of PVD-sputtered Al interlayer |
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| ZHENG Lin
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ZUO Dun-wen
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XU Feng
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LU Wen-zhuang
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ZHANG Xu-hui
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HUANG Mei-jian
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ZHU Liang-jie.Study of CVD diamond coating on Cemented Carbide of PVD-sputtered Al interlayer[J].Machine Building & Automation,2012,41(3):27-29,42. |
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| Authors: | ZHENG Lin ZUO Dun-wen XU Feng LU Wen-zhuang ZHANG Xu-hui HUANG Mei-jian ZHU Liang-jie |
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| Affiliation: | (Research Institution of Anti-fatigue Manufacturing and Surface Engineering,NUAA,Nanjing,210016,China) |
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| Abstract: | The WC-10%Co cutting tool material is pre-treated by Murakami solution and aqua regia;then aluminum(Al) is sputtered on the hard-metal by direct current magnetron sputtering(DCS) technology.Diamond thin films are deposited on the cemented carbide by hot filament chemical vapor deposition(HFCVD) process.The diamond nucleation mechanism on the hard-metal is analyzed.The results show that as compared with uncoated Al interlayer sample,its diamond nucleation density is higher and the diamond grain size is smaller. |
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| Keywords: | DCS Al interlayer diamond thin film cemented carbide |
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