Optical and Mechanical Properties of Thin PTFE Films,Deposited from a Gas Phase |
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| Authors: | Kostyantyn Grytsenko Yurii Kolomzarov Peter Lytvyn Olga Kondratenko Mykola Sopinskyy Iryna Lebedyeva Agata Niemczyk Jolanta Baranovska Dariusz Moszyński Claus Villringer Sigurd Schrader |
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| Affiliation: | 1. Department of Photonic, Laser and Plasma Technologies, Institute of Applied Physics, Technical University of Applied Sciences Wildau, Hochschulring 1, D-15745 Wildau, Germany;2. Department of Optoelectronics, Institute of Semiconductor Physics, pr. Nauky 41, Kyiv, 03650 Ukraine;3. Faculty of Mechanics and Mathematics, Taras Shevchenko University of Kyiv, 64/13 Volodymyrs'ka Str., Kyiv, 01601 Ukraine;4. Department of Materials Technology, Faculty of Mechanical Engineering and Mechatronics, West Pomeranian University of Technology in Szczecin, Szczecin, 70-310 Poland;5. Department of Chemical and Environment Engineering, Faculty of Chemical Technology and Engineering, West Pomeranian University of Technology in Szczecin, Szczecin, 71-065 Poland |
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| Abstract: | Thin polytetrafluoroethylene (PTFE) films are produced by deposition from a gas phase by two methods: electron-enhanced vacuum deposition (EVD) and EVD + low-temperature plasma (LTP). Structure, morphology, and composition of the films are studied by IR spectroscopy, atomic force microscopy, and X-ray photoelectron spectroscopy. They are close to the structure of bulk PTFE. The roughness of the films’ surface is changed with gas pressure and LTP power variations. Films are transparent from UV to near-infrared regions. Refractive and extinction indices and their anisotropy are measured by spectral ellipsometry. They are tuned by variations of deposition conditions. Hardness and Young modulus of the films are increased if EVD + low power LTP is used for film deposition. Use of EVD + LTP also increases thermal stability of the films. Contact angle of the films corresponds to the bulk PTFE. The PTFE molecules oriented are preferentially in perpendicular direction to the substrate surface. |
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| Keywords: | deposition in vacuum multiphase structure formation optical properties plasma polytetrafluoroethylene thin films |
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