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Relationship between subsurface damage and surface roughness of ground optical materials
作者姓名:李圣怡  王卓  吴宇列
作者单位:College of Mechatronic Engineering and Automation National University of Defense Technology,College of Mechatronic Engineering and Automation National University of Defense Technology,College of Mechatronic Engineering and Automation National University of Defense Technology,Changsha 410073 China,Changsha 410073 China,Changsha 410073 China
摘    要:A theoretical model of relationship between subsurface damage and surface roughness was established to realize rapid and non-destructive measurement of subsurface damage of ground optical materials.Postulated condition of the model was that subsurface damage depth and peak-to-valley surface roughness are equal to depth of radial and lateral cracks in brittle surface induced by small-radius(radius≤200 μm)spherical indenter,respectively.And contribution of elastic stress field to the radial cracks propagation was also considered in the loading cycle.Subsurface damage depth of ground BK7 glasses was measured by magnetorheological finishing spot technique to validate theoretical ratio of subsurface damage to surface roughness.The results show that the ratio is directly proportional to load of abrasive grains and hardness of optical materials,while inversely proportional to granularity of abrasive grains and fracture toughness of optical materials.Moreover,the influence of the load and fracture toughness on the ratio is more significant than the granularity and hardness,respectively.The measured ratios of 80 grit and 120 grit fixed abrasive grinding of BK7 glasses are 5.8 and 5.4,respectively.

关 键 词:光学材料  地下损伤  硬度计压头  研磨工艺
收稿时间:24 October 2006
修稿时间:2006-10-242006-12-27

Relationship between subsurface damage and surface roughness of ground optical materials
Li Sheng-yi , Wang Zhuo and Wu Yu-lie.Relationship between subsurface damage and surface roughness of ground optical materials[J].Journal of Central South University of Technology,2007,14(4):546-551.
Authors:Li Sheng-yi  Wang Zhuo and Wu Yu-lie
Affiliation:College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China
Abstract:A theoretical model of relationship between subsurface damage and surface roughness was established to realize rapid and non-destructive measurement of subsurface damage of ground optical materials. Postulated condition of the model was that subsurface damage depth and peak-to-valley surface roughness are equal to depth of radial and lateral cracks in brittle surface induced by small-radius (radius ⩽ 200 μm) spherical indenter, respectively. And contribution of elastic stress field to the radial cracks propagation was also considered in the loading cycle. Subsurface damage depth of ground BK7 glasses was measured by magnetorheological finishing spot technique to validate theoretical ratio of subsurface damage to surface roughness. The results show that the ratio is directly proportional to load of abrasive grains and hardness of optical materials, while inversely proportional to granularity of abrasive grains and fracture toughness of optical materials. Moreover, the influence of the load and fracture toughness on the ratio is more significant than the granularity and hardness, respectively. The measured ratios of 80 grit and 120 grit fixed abrasive grinding of BK7 glasses are 5.8 and 5.4, respectively. Foundation item: Project(50375156) supported by the National Natural Science Foundation of China
Keywords:subsurface damage  spherical indenter  optical materials  grinding process  magnetorheological finishing
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