| 高温对Ge_xSi_(1-x)/Si光波导及材料的影响 |
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| 引用本文： | 李国正,高勇,刘恩科.高温对Ge_xSi_(1-x)/Si光波导及材料的影响[J].固体电子学研究与进展,1996(1). |
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| 作者姓名： | 李国正 高勇 刘恩科 |
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| 作者单位： | 西安交通大学电子工程系 |
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| 摘 要： | 用ＧｅｘＳｉ１－ｘ／Ｓｉ亚稳材料在高温下制作了光波导，它的传输损耗为０．８ｄＢ／ｃｍ，比低温工艺的０．５ｄＢ／ｃｍ稍大。并发现ＧｅｘＳｉ１－ｘ／Ｓｉ材料的大量失配位错和一些有趣的现象。
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| 关 键 词： | GeSi位错，光波导 |
Effect of High Temperature on GexSi_(1-x)/Si Crystal and Optical Waveguides |
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| Li Guozheng,Gao Yong,Liu Enke.Effect of High Temperature on GexSi_(1-x)/Si Crystal and Optical Waveguides[J].Research & Progress of Solid State Electronics,1996(1). |
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| Authors: | Li Guozheng Gao Yong Liu Enke |
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| Abstract: | The GexSi1-x/Si optical waveguides were fabricated after high temperature processing.It is found that the GexSi1-x/Si crystal has a lot of dislocation defects and some interesting phenomena.propagation losses of the waveguides is about 0.8 dB/cm.Which is higher than one of the waveguides by low temperature processing. |
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| Keywords: | GeSi Dislocation Optical Waveguides |
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