| 高温对Ge_xSi_(1-x)/Si光波导及材料的影响 |
| |
| 引用本文： | 李国正,高勇,刘恩科. 高温对Ge_xSi_(1-x)/Si光波导及材料的影响[J]. 固体电子学研究与进展, 1996, 0(1) |
| |
| 作者姓名： | 李国正 高勇 刘恩科 |
| |
| 作者单位： | 西安交通大学电子工程系 |
| |
| 摘 要： | 用ＧｅｘＳｉ１－ｘ／Ｓｉ亚稳材料在高温下制作了光波导，它的传输损耗为０．８ｄＢ／ｃｍ，比低温工艺的０．５ｄＢ／ｃｍ稍大。并发现ＧｅｘＳｉ１－ｘ／Ｓｉ材料的大量失配位错和一些有趣的现象。
|
| 关 键 词： | GeSi位错，光波导 |
Effect of High Temperature on GexSi_(1-x)/Si Crystal and Optical Waveguides |
| |
| Li Guozheng,Gao Yong,Liu Enke. Effect of High Temperature on GexSi_(1-x)/Si Crystal and Optical Waveguides[J]. Research & Progress of Solid State Electronics, 1996, 0(1) |
| |
| Authors: | Li Guozheng Gao Yong Liu Enke |
| |
| Abstract: | The GexSi1-x/Si optical waveguides were fabricated after high temperature processing.It is found that the GexSi1-x/Si crystal has a lot of dislocation defects and some interesting phenomena.propagation losses of the waveguides is about 0.8 dB/cm.Which is higher than one of the waveguides by low temperature processing. |
| |
| Keywords: | GeSi Dislocation Optical Waveguides |
| 本文献已被 CNKI 等数据库收录！ |
