| 氮化铁梯度薄膜的制备 |
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| 引用本文： | 姜恩永,刘晖,刘明升,林川,孙多春.氮化铁梯度薄膜的制备[J].材料研究学报,1995,9(1):50-54. |
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| 作者姓名： | 姜恩永 刘晖 刘明升 林川 孙多春 |
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| 作者单位： | 天津大学，清华大学 |
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| 摘 要： | 用对向靶溅射仪制备了具有梯度结构的氮化铁薄膜材料．卢瑟福背散射分析结果表明，铁、氮两种原子的密度沿膜厚度方向呈梯度变化．在薄膜中有ζ－Ｆｅ２Ｎ，ε－ＦｅｘＮ（２＜ｘ＜３），γ′－Ｆｅ４Ｎ和α″－Ｆｅ１６Ｎ２等物相．振动样品磁强计测试结果表明部分梯度膜的饱和磁化强度值接近纯铁膜，膜面富铁的梯度样品的矫顽力与基底富铁的梯度样品的矫顽力相差很大。
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| 关 键 词： | 对向靶溅射 氮化铁薄膜 梯度薄膜 卢瑟福背散射 |
| 收稿时间： | 1995-02-25 |
| 修稿时间： | 1995-02-25 |
PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS |
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| JIANG Enyong,LIU Hui,LIU Mingsheng,LIN ChuanSUN Duochun.PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS[J].Chinese Journal of Materials Research,1995,9(1):50-54. |
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| Authors: | JIANG Enyong LIU Hui LIU Mingsheng LIN ChuanSUN Duochun |
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| Affiliation: | JIANG Enyong,LIU Hui,LIU Mingsheng,LIN Chuan(Tianjin University)SUN Duochun(Tsinghua University)(Correspondent:JIANG Enyong,Department of Applied Physics,Tianjin University,Tianjin ) |
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| Abstract: | In this paper. the functionally gradient iron nitrides thin films were prepared by facing targets sputtering. Rutherford backscattering spectrometry (RBS) demonstrates that the concentration of Fe or N atoms varies gradually from the substrate to the surf |
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| Keywords: | facing targets sputtering iron nitrides thin films functionally gradient thin films Rutherford backscattering spectrometry |
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