| Ge薄膜X光激光靶的研制 |
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| 引用本文： | 周斌 王珏. Ge薄膜X光激光靶的研制[J]. 原子能科学技术, 1996, 30(1): 8-16 |
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| 作者姓名： | 周斌 王珏 |
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| 作者单位： | 同济大学波耳固体物理研究所 |
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| 基金项目： | 国家高技术强激光领域基金 |
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| 摘 要： | 针对Ｇｅ薄膜应力较大的特点，采用热蒸发方式制备Ｇｅ膜。研究了不同脱膜剂和基片温度对Ｇｅ膜结构的影响。采用新的反粘脱膜工艺，制备出了比较满意的Ｇｅ薄膜靶。
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| 关 键 词： | 锗 薄膜靶 脱膜剂 膜结构 X光激光 |
THE PREPARATION OF GERMANIUM FOIL X-RAY LASER TARGET |
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| Zhou Bin, Wang Jue, Du Baoqi, Chen Lingyan. THE PREPARATION OF GERMANIUM FOIL X-RAY LASER TARGET[J]. Atomic Energy Science and Technology, 1996, 30(1): 8-16 |
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| Authors: | Zhou Bin Wang Jue Du Baoqi Chen Lingyan |
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| Abstract: | In accordance with strong internal stress of germanium foil, the foil is prepared on glass substrate with different removers using thermal evaporation technique. The structures of foil derived from different preparation process are analysed. A new remover and a special process are used to obtain germanium foil targets with high quality. |
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| Keywords: | Germanium foil target Remover Foil structure |
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