分布式MEMS移相器桥高度与相移量的机电集成模型及应用

移相器是控制相控阵天线空间波束捷变的方向盘，其性能的优良决定着相控阵天线性能的高低。微机电系统(MEMS)移相器优势明显，但由于相控阵天线工作环境复杂，环境载荷会导致MEMS移相器结构变形，进而直接降低整个相控阵天线的性能。为此，该文研究MEMS移相器关键结构参数和电性能之间的耦合关系，将复杂环境要素对物理结构的影响传递到结构参数和电参数上，推导出分布式MEMS移相器的机电集成模型，并利用集成模型对变形MEMS移相器进行电性能快速评估和结构公差计算。仿真结果说明了集成模型的有效性和工程应用价值。

Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

Phase shifter is the steering wheel to control the beam direction of Phased Array Antenna (PAA), which determines the performance of the PAA. Micro Electronic Mechanical System (MEMS) phase shifter has obvious advantages for PAA, but there always exists structural deformation caused by the complex work environment and environmental load of the PAA, which has serious impact over the performance of the PAA. Therefore, the coupling between the key structural parameters of MEMS phase shifter and the electrical parameters is studied by transmitting the influence of complex environmental factors on structure of MEMS to the structural and electrical parameters. The electromechanical integrated model of distributed MEMS phase shifter is derived. Besides, the rapid performance assessment and structural tolerance of the deformed MEMS phase shifter is calculated based on the coupled model. The simulation results show the effectiveness of the coupled model and the engineering application value.