| 轮廓光电自动调焦系统 |
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| 引用本文： | 曹福生,袭颖刚.轮廓光电自动调焦系统[J].光学仪器,1986(1). |
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| 作者姓名： | 曹福生 袭颖刚 |
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| 作者单位： | 上海光学仪器研究所，上海光学仪器研究所 |
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| 摘 要： | 本文叙述我所研制的轮廓光电自动调焦的原理。实验证明:移动范围在±10μm时,重复精度为±0.5μm;大于±10μm 时,重复精度为±1μm。
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Automatic Focussing Photoelectric Device |
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| Abstract: | This paper will describe the principle of the automatic focussing photoelectric device which has researched by Shanghai Optical Instrument Research Institute.The experiment result has proved to be true that the repeatebility is above +0.5μm in measuring range of±10μm and above ±1μm in measuring range of above±10μm. |
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