| 多线切割系统中切割线张力检测与调整 |
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| 引用本文： | 贺敬良,董和媛. 多线切割系统中切割线张力检测与调整[J]. 北京机械工业学院学报, 2014, 0(1): 12-15,36 |
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| 作者姓名： | 贺敬良 董和媛 |
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| 作者单位： | 北京信息科技大学机电工程学院,北京100192 |
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| 基金项目： | 北京市教育委员会发展计划项目（KM2011232004） |
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| 摘 要： | 基于大直径、超薄硅片对多线切割机的要求,针对典型张力调整方法的不足,对张力检测与调整技术进行了研究,即应用传感器检测张力且采用扭矩电机驱动张力摆杆调节张力。同时,对张力检测与调整系统进行了设计。将所研究的张力检测与调整方法应用到DQX型多线切割样机上,利用多线切割样机验证了该方法的可行性。
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| 关 键 词： | 多线切割 张力检测 张力调整 |
Cutting line tension detection and adjustment in the multi-mire sawing system |
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| HE Jing-liang,DONG He-yuan. Cutting line tension detection and adjustment in the multi-mire sawing system[J]. Journal of Beijing Institute of Machinery, 2014, 0(1): 12-15,36 |
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| Authors: | HE Jing-liang DONG He-yuan |
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| Affiliation: | (Mechanical ＆ Electroical Engineering School ,Beijing Information Science and Technology University ,Beijing 100192, China) |
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| Abstract: | Based on the requirements of the large-diameter and ultra-thin silicon wafer for multi- wire saw, the tension detection and adjustment technology is studied aiming at the lack of typical tension adjustment methods. Sensors are used to detect tension, and torque motor is used to drive the tension rocker to adjust tension. At the same time, the tension detection and adjustment system is designed. Tension detection and adjustment method being studied is applied to DQX multi-wire saw. Multi-wire sawing prototype is used to verify the feasibility of this method. |
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| Keywords: | multi-wire saw tension detection tension adjustment |
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