| 内嵌于多层封装基板的折叠波导慢波结构设计 |
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| 引用本文： | 姚雅婷,缪 旻.内嵌于多层封装基板的折叠波导慢波结构设计[J].北京机械工业学院学报,2014(1):43-47. |
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| 作者姓名： | 姚雅婷 缪 旻 |
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| 作者单位： | [1]北京信息科技大学信息微系统研究所,北京100101 [2]北京大学微米／纳米加工技术国家级重点实验室,北京100871 |
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| 基金项目： | 国家自然科学基金资助项目（60976083,61176102）;北京市自然科学基金资助项目（3102014）;国家重大科技专项基金资助项目（2009ZX02038）;北京市属高等学校人才强教计划资助项目（PHR201108257） |
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| 摘 要： | 提出了一种新型的内嵌于多层封装基板的折叠波导慢波结构。开展了此慢波结构的解析模型、色散特性和耦合阻抗、射频传输特性以及注—波互作用的研究。通过理论分析、数值计算和仿真优化得到了较好的结果。在W波段该结构呈现反射小、损耗低,易于加工等特点。在中心频率94 GHz处色散曲线较为平坦,耦合阻抗值在2Ω左右。同时,对低温共烧陶瓷的材料特性及加工工艺进行了研究,探讨了该结构实现加工的可行性。
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| 关 键 词： | 折叠波导 慢波结构 返波振荡器 低温共烧陶瓷 |
Design of folded waveguide slow-wave structure embedded in multilayer package substrate |
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| YAO Ya-ting,MIAO.Design of folded waveguide slow-wave structure embedded in multilayer package substrate[J].Journal of Beijing Institute of Machinery,2014(1):43-47. |
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| Authors: | YAO Ya-ting MIAO |
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| Affiliation: | Min (1. Information Microsystem Institute, Beijing Information Science and Technology University, Beijing 100101, China; 2. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China) |
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| Abstract: | A novel folded waveguide slow- wave structure embedded in a multilayer package substrate is put forward. The analytical model, dispersion characteristics, coupling impedance, RF transmission characteristics and beam-wave interaction of this slow-wave structure are studied. Improved results are obtained by optimization through theoretical analysis, numerical calculation and simulation. In W-band, this structure presents the characteristics of low reflections, low loss and easy processing, etc. Dispersion curve is relatively flat at the center frequency of 94GHz, and the coupling impedance value is around 2 ohm. Meanwhile, the material properties and processing technologies of LTCC （low temperature co-fired ceramic）are also studied, and the feasibility of the structure microfabrication is discussed. |
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| Keywords: | folded waveguide slow - wave structure backward wave oscillator LTCC （ low temperature co-fired ceramic） |
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