Simulation of the potting effect on the high-G MEMS accelerometer |
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Authors: | Yuqi Jiang Maohua Du Le Luo Xinxin Li |
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Affiliation: | (1) State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 200050 Shanghai, China |
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Abstract: | The package structure of a high-G microelectromechanical systems (MEMS) accelerometer was studied using the finite element
method. When the Young’s modulus of the potting resin is E<1 GPa, vibration of the package behaved as vibration of the potting
resin at natural frequencies much lower than those of the header. Potting resin with E≥5 GPa was rigid enough and suitable
for the potting of the accelerometer. Under a 100,000-G acceleration, the output voltage of the accelerometer decreased slightly
(by about 0.1%) with the increase in Young’s modulus or density of the potting resin. The simulated output voltage was close
to the analytical solution, well linear with the acceleration applied. The potting effect on the output voltage of the accelerometer
could be ignored. |
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Keywords: | High-G micro-electromechanical system (MEMS) accelerometer potting finite element analysis |
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