| 光刻机箱体内部温度控制系统的硬件设计 |
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| 引用本文： | 冯艳. 光刻机箱体内部温度控制系统的硬件设计[J]. 仪器仪表用户, 2009, 16(4): 69-70. DOI: 10.3969/j.issn.1671-1041.2009.04.040 |
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| 作者姓名： | 冯艳 |
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| 作者单位： | 安徽建筑工业学院,数理系,合肥,230601 |
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| 基金项目： | 安徽建筑工业学院校内青年基金 |
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| 摘 要： | 本文介绍了利用PLC实现的光刻机箱体内部温度控制系统的一个硬件设计方案。实验证明。本方案具有设计合理、性能稳定可靠、易于推广等特点。
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| 关 键 词： | 温度控制 光刻机 PLC 半导体加工 |
Hardware design on temperature control system of photoeteching machine |
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| FENG Yan. Hardware design on temperature control system of photoeteching machine[J]. Electronic Instrumentation Customer, 2009, 16(4): 69-70. DOI: 10.3969/j.issn.1671-1041.2009.04.040 |
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| Authors: | FENG Yan |
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| Affiliation: | Department of Mathmatis & Physics;AnhuiI University of Architecture;Hefei 230601;China |
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| Abstract: | This paper introduce a schedule about hardware design on temperature control system of photoeteching machine.It is based on PLC.And the experiment approves that it is reasonable and easy to be sale promotion. |
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| Keywords: | PLC |
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