| Si衬底上Mg0.3Zn0.7O薄膜结构及光学性能 |
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| 引用本文： | 刘全生,张希艳,柏朝晖,王能利,王晓春,米晓云,卢利平,孔智艳.Si衬底上Mg0.3Zn0.7O薄膜结构及光学性能[J].硅酸盐通报,2009,28(3):619-623. |
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| 作者姓名： | 刘全生 张希艳 柏朝晖 王能利 王晓春 米晓云 卢利平 孔智艳 |
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| 作者单位： | 长春理工大学光电功能材料教育部工程研究中心,长春,130022 |
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| 基金项目： | 国家自然科学基金项目资助 |
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| 摘 要： | 采用溶胶-凝胶旋涂法在Si衬底上制备了Mg0.3Zn0.7 O薄膜,采用X射线衍射仪、扫描电子显微镜、紫外-可见荧光光谱仪和紫外-可见分光光度仪测试了Mg0.3Zn0.7O薄膜的结构和光学性能.结果表明:Si衬底上Mg0.3.Zn0.7O薄膜以六方相ZnO纤锌矿为主,存在少部分立方相MgO,薄膜均匀,平均粒径约为40 nm.吸收光谱中吸收边位于313 nm,相应的带隙为3.96 eV.发光光谱是峰值位于421 nm的宽带谱,激发光谱范围宽,具有近紫外激发优势.
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| 关 键 词： | Mg0.3Zn0.7O薄膜 溶胶凝胶法 硅衬底 紫外发光 |
Structure and Optical Properties of Mg_(0.3)Zn_(0.7)O Film Deposited on Si Substrate |
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| LIU Quan-sheng,ZHANG Xi-yan,BAI Zhao-hui,WANG Neng-li,WANG Xiao-chun,MI Xiao-yun,LU Li-ping,KONG Zhi-yan.Structure and Optical Properties of Mg_(0.3)Zn_(0.7)O Film Deposited on Si Substrate[J].Bulletin of the Chinese Ceramic Society,2009,28(3):619-623. |
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| Authors: | LIU Quan-sheng ZHANG Xi-yan BAI Zhao-hui WANG Neng-li WANG Xiao-chun MI Xiao-yun LU Li-ping KONG Zhi-yan |
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| Affiliation: | Engineering Research Center of Optoelectronic Functional Materials of the Ministry of Education;Changchun University of Science and Technology;Changchun 130022;China |
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| Abstract: | Mg0.3Zn0.7O film was prepared on silicon substrate by Sol-gel spin-coating method.Structure and optical properties of Mg0.3Zn0.7O film were measured by X-ray diffraction,scanning electron microscope and UV-visible fluorescence spectrometer and UV-visible spectrophotometer.Results indicate that Mg0.3Zn0.7O film is mainly hexagonal wurtzite ZnO.There also exists few MgO cubic phase.The film is homogeneous and the average grain diameter is about 40 nm.The band edge in absorption spectrum is at 313 nm and the c... |
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