计量圆光栅环形莫尔条纹的刻划偏心调试误差分析

本文对刻划不通过中心的计量圆光栅,环形莫尔条纹,刻划时的偏心调试误差进行了讨论。并提出了刻划时偏心调试误差的公差范围。这对提高计量圆光栅的莫尔条纹位置精度及刻划质量,有一定的实际意义。

Division Offsetting Debugging Error Analysis of Ring Moire Fringe of metrological Radial Gratings

The division offsetting debugging error analysis of ring mcite fringe of metrologial radial gratings are discussed in this paper And the tolerance extent of division offsetting debugging error is also given, which is helpful to the pratical use for improving the position accuracy and surface quality of metrological radial gratings.