| 三维激光烧蚀加工的精度控制 |
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| 引用本文： | 李力钧,刘劲松,洪蕾,金湘中. 三维激光烧蚀加工的精度控制[J]. 应用激光, 1998, 0(4) |
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| 作者姓名： | 李力钧 刘劲松 洪蕾 金湘中 |
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| 作者单位： | 湖南大学激光研究所!长沙，410082，湖南大学激光研究所!长沙，410082，湖南大学激光研究所!长沙，410082，湖南大学激光研究所!长沙，410082 |
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| 摘 要： | 本文在分析三维激光烧蚀加工加工精度的控制策略的基础上，开发了一套在线测量控制系统。以声光调QYAG激光的连续输出光作为测量光源，采用光学三角测量装置在线检测待加工表面相对指定位置的偏移，测得信号闭环控制声光调QYAG激光巨脉冲的发射，从而显著提高了沿光轴方向烧蚀加工位置的确定度和加工精度。
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| 关 键 词： | 激光 烧蚀加工 精度控制 |
Accuracy Control of Three Dimensional Laser Shaping by Ablation |
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| Li Lijun,Liu Jingsong, Hong Lei,Jin Xiangzhong. Accuracy Control of Three Dimensional Laser Shaping by Ablation[J]. Applied Laser, 1998, 0(4) |
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| Authors: | Li Lijun Liu Jingsong Hong Lei Jin Xiangzhong |
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| Abstract: | An online workpiece position measuring device and a closed loop control system is developed for accuracy control of three dimensional laser shaping by ablation. The small continuous wave output of an acoustic-optical Q-switched YAG laser is used as the photo source of the measuring device. A laser triangulation device is chosen to detect the deviation of the workpiece surface from a fixed position. The measured signal is used to control the emission of the Qswitched pulse laser for ablation. In this way,the uncertainty of the ablation position along the optical axis is greatly limited and the accuracy of the process is increased. |
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| Keywords: | laser shaping ablation accuracy control |
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