| 微机械自润滑材料的摩擦性能研究 |
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| 引用本文： | 张鹏,刘刚,田扬超. 微机械自润滑材料的摩擦性能研究[J]. 微细加工技术, 2002, 0(1): 66-70 |
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| 作者姓名： | 张鹏 刘刚 田扬超 |
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| 作者单位： | 中国科学技术大学国家同步辐射实验室,合肥,230029 |
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| 摘 要： | 研究了Ni-MoS2自润滑层在不同工艺条件下的结构特征、形貌，并分析其摩擦特性，发现润滑层表面粗糙度和厚度对摩察系数影响较大；即使MoS2含量较少，Ni-MoS2复合镀层的极限剪切模量也比金属Ni降低很多。这为LIGA技术制造自润滑MEMS器件提供了有益的参考，并提供低MoS2含量的Ni-MoS2复合材料的一些基本性质。
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| 关 键 词： | 微机械 自润滑材料 摩察性能 |
| 文章编号： | 1003-8213(2002)01-0066-05 |
| 修稿时间： | 2001-05-25 |
Study on Microfabrication of a Seif-lubricant Material Used in MEMS |
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| ZHANG Peng,LIU Gang,TIAN Yang chao. Study on Microfabrication of a Seif-lubricant Material Used in MEMS[J]. Microfabrication Technology, 2002, 0(1): 66-70 |
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| Authors: | ZHANG Peng LIU Gang TIAN Yang chao |
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| Abstract: | The structure characteristics and topography of Ni MoS 2 self lubricant layer under the different processing conditions are studied and its microfabrication performance is analyzed. It is found that the thickness and surface roughness of the layer have big effect on the friction coifficent. Even the content of MoS 2 in Ni MoS 2 is less the limited shearing modulus of Ni MoS 2 plated layer is much lower than that of the metal Ni. The study is helpful for the manufacture of MEMS device by LIGA technology and gives some basic properties of the Ni MoS 2 compound material with less content of MoS 2. |
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| Keywords: | Ni MoS 2 LIGA MEMS microfriction. |
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