Phase Separation of Alkoxy-derived (Ti,Sn)O2 Oriented Thin Films |
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| Authors: | Shuichi Arakawa Kenji Mogi Ko-ichi Kikuta Toshinobu Yogo Shin-ichi Hirano Yoji Seki Mitsutoshi Kawamoto |
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| Affiliation: | Department of Applied Chemistry, School of Engineering, Nagoya University, Nagoya 464–01, Japan;Kyocera Central Research Laboratory, Kokubu, Kagoshima 899–43, Japan |
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| Abstract: | Oriented (Ti,Sn)O2 thin films with modulated microstructure were successfully synthesized on sapphire substrates by using sol–gel processing combined with spinodal decomposition. The degree of orientation of (Ti0.5Sn0.5)O2 thin films increased in the following order: sapphire (0001), (11  0), and (01  2). (Ti0.5Sn0.5)O2 thin films underwent spinodal decomposition at 900°C by annealing. The variation of the 2theta value of the 202 reflection of (Ti0.5Sn0.5)O2 films showed the typical behavior of spinodal decomposition. The rate of spinodal decomposition of the (Ti0.5Sn0.5)O2 films on sapphire (11 0) was faster than that on sapphire (01 2) substrates. The characteristic modulated microstructure was observed for the spinodally decomposed (Ti0.5Sn0.5)O2 films on sapphire (01 2) substrates by transmission electron microscopy. (Ti0.3Sn0.7)O2 films on sapphire (01 2) substrates were binodally decomposed during annealing at 1300°C. |
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