| Relation between EL2 Groupand EL6 Group in SI-GaAs |
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| 作者姓名： | 吴凤美 赵周英 |
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| 作者单位： | Wu Fengmei(Deportment of physics，Nanjing University，Nanjing 210093，China)Zhao Zhouying(Nanjing Electronic Devices Institute，Nanjing 210016，China) |
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| 摘 要： | ＲｅｌａｔｉｏｎｂｅｔｗｅｅｎＥＬ２ＧｒｏｕｐａｎｄＥＬ６ＧｒｏｕｐｉｎＳＩ－ＧａＡｓＷｕＦｅｎｇｍｅｉ吴凤美（Ｄｅｐｏｒｔｍｅｎｔｏｆｐｈｙｓｉｃｓ，ＮａｎｊｉｎｇＵｎｉｖｅｒｓｉｔｙ，Ｎａｎｊｉｎｇ２１００９３，Ｃｈｉｎａ）ＺｈａｏＺｈｏｕｙｉｎ...
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Relation between EL2 Groupand EL6 Group in SI-GaAs |
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| Wu Fengmei.Relation between EL2 Groupand EL6 Group in SI-GaAs[J].Rare Metals,1996(3). |
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| Authors: | Wu Fengmei |
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| Abstract: | |
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| Keywords: | SI-GaAs PITS technique EL2 EL6 Rapid thermal annealing |
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