多离子束反应共溅射技术制备（Pb,La）TiO3铁电薄膜及薄膜物化性能表征

研制了多离子束反应溅射技术并运用该技术在多种衬底上制备晶态（Ｐｂ，Ｌａ）ＴｉＯ３铁电薄膜。运用多种分析技术对铁电薄膜的物化性能进行了表征。发现在铁电薄膜的近表面有富铅层。测试了铁电薄膜的电滞回线、矫顽场、折射率、吸收系数等电学和光学参数。利用该技术可在较低衬底温度下在位制备组分可调、附着力强的外延或高度择优取向的铁电薄膜。

The Preparation and Characterization of (Pb, La)TiO3 FerroelectricThin Films Deposited by Multi-Ion-Beam Reactive Technique

erroelectric thin films of lanthanirmumodified lead titanate (Ph, La)TiO3 were successfully grown onmany substrates by multi-ion-beam reactive cosputtering (MIBRECS)technique. Some analysis techniques,such as x-ray diffraction (XRD),x-ray photoelectron spectroscopy (XPS), reflection high-energy electrondiffraction (RHEED ), energy-dispersive analysis of x-ray (EDAX ), and Auger electron spectroscopy(AES) were performed for characterization of (Ph, La)TiO3 ferroelectric thin films. It was found thatthe chemical composion of the films in the near surface was Ph enriched. D-Ehysteresis loop was measuredby modified Sawyer-Tower circuit. Such electric and optical parameters as remanent polarization (Pr),coercive field (Ec ), refractive index (n ), and absorption coefficient (a ) were measured. MIBRECStechnique seems a promising process for fabricating multicomponent oxide thin films in lower substratetemperature with high reproducibility.