| 微细台阶测量技术的发展现状 |
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| 引用本文： | 白立芬,李庆祥,薛实福,黄成伟. 微细台阶测量技术的发展现状[J]. 电子工业专用设备, 2001, 30(2): 1-6 |
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| 作者姓名： | 白立芬 李庆祥 薛实福 黄成伟 |
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| 作者单位： | 清华大学精密仪器与机械学系, |
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| 基金项目： | 国家自然科学基金资助项目 (5 9875 0 5 2 ) |
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| 摘 要： | 微细台阶参数是大规模集成电路和微机械结构制作过程的重要技术指标 ,直接影响器件和构件的特性 ,目前要求台阶测量应具有纳米级精度。概要介绍了台阶测量技术的发展情况 ,阐述了非接触台阶测量和接触式台阶测量技术 ,从测量原理、测量精度与分辨率、适用范围、对被测对象的要求与影响等几方面分析了各种测量方法的特点 ,并得出了结论。
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| 关 键 词： | 微细台阶 纳米技术 接触式测量 非接触式测量 |
| 文章编号： | 1004-4507(2001)02-0001-06 |
| 修稿时间： | 2001-05-30 |
Development of Step Height Measuring Technology |
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| BAI Li-fen,LI Qing-xiang,XUE Shi-fu,HUANG Cheng-wei. Development of Step Height Measuring Technology[J]. Equipment for Electronic Products Marufacturing, 2001, 30(2): 1-6 |
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| Authors: | BAI Li-fen LI Qing-xiang XUE Shi-fu HUANG Cheng-wei |
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| Abstract: | Measurement of step parameters is a key testing method in the process of large scale integrated circuit manufacturing.By far,the precision of step height measurement is up to nanometer scale.In this paper,the development of step height measuring technology was introduced in brief,then the non-contact measuring technologies and contact technologies were discussed in detail.The characteristics of every method were analyzed according to the measuring principle,precision and resolution,application,specimen to be measured etc.Then the conclusion was drawn. |
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| Keywords: | Micro Step Microtechnology and Nanotechnology Contact Measuring Non-contact Measuring |
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