| Si（100）衬底上制备液氮温区超导薄膜 |
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| 引用本文： | 胡倾宇,赵航炜,闻立时,王永忠,乔桂文.Si（100）衬底上制备液氮温区超导薄膜[J].金属学报,1989,25(3):152-154. |
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| 作者姓名： | 胡倾宇 赵航炜 闻立时 王永忠 乔桂文 |
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| 作者单位： | 中国科学院金属研究所，中国科学院金属研究所，中国科学院金属研究所，中国科学院金属研究所，中国科学院金属研究所 |
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| 摘 要： | 本文报道用离子束溅射法在单晶Si(100)衬底上沉积YBaCuO超导薄膜的实验结果。Y稳定ZrO_2层作为衬底和超导膜的中间层,具有良好的扩散阻止效果。薄膜具有强烈的c轴织构,其化学组成接近123相。薄膜的超导起始转变温度为100K,零电阻温度为78K。
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| 关 键 词： | 超导薄膜 Si（100） Si衬底 超导材料 |
| 收稿时间： | 1989-03-18 |
| 修稿时间： | 1989-03-18 |
PREPARATION OF LN_2 TEMPERATURE REGION SUPERCONDUCTOR FILM ON Si(100) SUBSTRATE |
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| HU Qingyu,ZHAO Hangwei,WEN Lishi,WANG Yongzhong,QIAO Guiwen Institute of Metal Research,Academia Sinica,Shenyang.PREPARATION OF LN_2 TEMPERATURE REGION SUPERCONDUCTOR FILM ON Si(100) SUBSTRATE[J].Acta Metallurgica Sinica,1989,25(3):152-154. |
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| Authors: | HU Qingyu ZHAO Hangwei WEN Lishi WANG Yongzhong QIAO Guiwen Institute of Metal Research Academia Sinica Shenyang |
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| Abstract: | We report the experimental results of the prepartion of YBaCuO superconductor
thin film on Si (100) substrate by the method of ion beam sputtering deposition. A ZrO_2 buf-
fer layer was applied to Si (100) substrate, and was found to play an important role in resist-
ing the diffusion of Si toward the film. The thin film is mainly a 123 phase with strong c-axis
preferred orentation. The onset transition temperature of the film is 100 K and the final
transition temperature 78 K. |
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| Keywords: | superconductor YBaCuO thin film Si substrate |
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