直线电机在水射流切割平台中的应用及设计研究

目前水射流切割平台在精密切割领域还存在一些问题,在精度和速度方面存在不足,而基于直线电机驱动的精密切割平台在切割半导体材料上,因其高速度和高精度而具有很大的潜力,相对于传统的"旋转伺服电机+滚珠丝杠"进给传动有着巨大的优势。综合分析水射流切割平台性能参数及要求,提出一套可行的直线电机选型方案,实现了直线电机在水射流精密切割数控机床上的可靠应用。

Research on Application and Design of Linear Motor in Water Jet

Up to nowadays,there are some problems of water jet platform in high precision jet field,such as accuracy and speed.So the great potential will be existed in cutting semiconductor material which based on high precision jet platform of linear motor direct-driving mode.The linear motor relative to the traditional rotary servo motor + ball bearing screw mandrel has great advantages.After comprehensive analysis the performance parameter and request of the water jet platform.I'll proposing a series of feasible scheme in collecting linear motor to realize faithful application of linear motor in numerical control machine with high precision jet.