| EFFECT OF BORON ON MICROSTRUCTURE AND PROPERTIES OF Ti-N FILM |
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| 作者姓名： | Yang Qiaoqin Zhao Lihua Xiao Hanning Material Test and Research Center Hunan University Changsha Zhao Nanfang Huang Qizhong Central South University of Technology Changsha |
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| 作者单位： | Yang Qiaoqin，Zhao Lihua，Xiao Hanning Material Test and Research Center，Hunan University，Changsha 410082 Zhao Nanfang，Huang Qizhong Central South University of Technology，Changsha 410083 |
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| 摘 要： | ＥＦＦＥＣＴＯＦＢＯＲＯＮＯＮＭＩＣＲＯＳＴＲＵＣＴＵＲＥＡＮＤＰＲＯＰＥＲＴＩＥＳＯＦＴｉＮＦＩＬＭ①ＹａｎｇＱｉａｏｑｉｎ，ＺｈａｏＬｉｈｕａ，ＸｉａｏＨａｎｎｉｎｇＭａｔｅｒｉａｌＴｅｓｔａｎｄＲｅｓｅａｒｃｈＣｅｎｔｅｒ，ＨｕｎａｎＵｎｉｖ...
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EFFECT OF BORON ON MICROSTRUCTURE AND PROPERTIES OF Ti N FILM |
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| Yang Qiaoqin,Zhao Lihua,Xiao Hanning Material Test and Research Center,Hunan University,Changsha Zhao Nanfang,Huang Qizhong Central South University of Technology,Changsha .EFFECT OF BORON ON MICROSTRUCTURE AND PROPERTIES OF Ti-N FILM[J].Transactions of Nonferrous Metals Society of China,1997(4). |
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| Authors: | Yang Qiaoqin Zhao Lihua Xiao Hanning Material Test and Research Center Hunan University Changsha Zhao Nanfang Huang Qizhong Central South University of Technology Changsha |
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| Affiliation: | Yang Qiaoqin,Zhao Lihua,Xiao Hanning Material Test and Research Center,Hunan University,Changsha 410082 Zhao Nanfang,Huang Qizhong Central South University of Technology,Changsha 410083 |
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| Abstract: | By adding boron to the Ti N film, a nanocrystalline multiphase composite Ti B N film was deposited using activation ion plating under different negative bias voltages. It is found that the mechnical properties of the Ti B N film are much better than that of the Ti N film. Diffraction measurements show that the composite film consists mainly of TiN with dispersed TiB, cubic BN and Ti B N phases. SEM and TEM micrographs indicate that the Ti B N film has a dense fine nanocrystalline structure and also a dense close interfacial bonding of the film to substrate. The results of AES and EPMA show that a diffusion zone exists at the film/ substrate interface and the higher the negative bias voltage, the wider the diffusion zone. |
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| Keywords: | boron Ti N film nanocrystalline multiphase composite |
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