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Effect of electrochemical etching current on prepared perforated silicon structures for neutron detectors |
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| Authors: | Xiao-Qiang FAN Yong JIANG Chang-Yong ZHAN Yu ZOU Jian-Chun WU Ning-Kang HUANG |
| Affiliation: | 1. Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China 2. Key Laboratory of Radiation Physics and Technology(Ministry of Education), Institute of Nuclear Science and Technology,Sichuan University, Chengdu 610064, China |
| Abstract: | |
| Keywords: | neutron detector silicon electrochemical etching current |
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