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| 折叠梁刚度的误差灵敏度分析 | |
| 引用本文： | 周吴,何晓平,苏伟,李柏林,陈黎丽. 折叠梁刚度的误差灵敏度分析[J]. 机械设计, 2010, 27(2) |
| 作者姓名： | 周吴 何晓平 苏伟 李柏林 陈黎丽 |
| 作者单位： | 1. 西南交通大学,机械工程学院,四川,成都,610031;中国工程物理研究院,电子工程研究所,四川,绵阳,621900 2. 中国工程物理研究院,电子工程研究所,四川,绵阳,621900 3. 西南交通大学,机械工程学院,四川,成都,610031 |
| 摘 要： | 对MEMS中并联或串联组合而成的两种折叠梁形式的总刚度进行了分析,分析了两种梁在总刚度相同的条件下对加工误差的灵敏度,指出在加工误差不可避免的情况下,选择合适的折叠梁结构来满足具体的运用要求。得出:除发生误差的情况之外,折叠梁对误差的灵敏度比单梁小得多。运用CoventorWave软件对梁结构在随机相对误差下进行了有限元仿真分析,验证了理论分析的正确性。 |
| 关 键 词： | 折叠梁 误差 相对误差 灵敏度 微结构 |
Error sensitivity analysis of folded beam stiffness |
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| ZHOU Wu ,,HE Xiao-ping,SU Wei,LI Bo-lin,CHEN Li-li. Error sensitivity analysis of folded beam stiffness[J]. Journal of Machine Design, 2010, 27(2) | |
| Authors: | ZHOU Wu HE Xiao-ping SU Wei LI Bo-lin CHEN Li-li |
| Affiliation: | 1.School of Mechanical Engineering/a>;Southwest Jiaotong University/a>;Chengdu 610031/a>;China/a>;2.Research Institute of Electronics Engineering/a>;China Academy of Engineering Science/a>;Mianyang 621900/a>;China |
| Abstract: | The total stiffness of two typed folded beams formed by the parallel and series combination in the micro electro-mechanical system(MEMS)was analyzed,and the sensitivity of machining error was analyzed on these two kinds of folded beam structures under the condition of same total stiffness.It has been pointed out that under the circumstances of inevitable machining errors by choosing the appropriate folded beam structure to satisfy the concrete application requirements.It has been obtained that the sensitivi... |
| Keywords: | folded beam error relative error sensitivity micro-structure |
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