EELS microanalysis of polycrystalline silicon thin films for solar cells grown at low temperatures |
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| Authors: | Michael St ger, Michael Nelhiebel, Peter Schattschneider, Viktor Schlosser, Alexander Breymesser,Bernard Jouffrey |
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| Affiliation: | Michael Stöger, Michael Nelhiebel, Peter Schattschneider, Viktor Schlosser, Alexander Breymesser,Bernard Jouffrey |
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| Abstract: | The aim of this work is the quantitative chemical analysis of polycrystalline silicon thin films grown on glass substrates at temperatures <600°C by means of transmission electron microscopy (TEM) and electron energy-loss spectrometry (EELS). Specimens produced with two different methods were investigated. We found significant differences in grain size and morphology, as well as in the distribution of oxygen. A surprisingly high amount of Ba diffusion from the subtrate was detected. |
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| Keywords: | Polycrystalline silicon thin films Chemical vapour deposition Electron energy-loss spectrometry Transmission electron microscopy |
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