| 基片对SrTiO_3薄膜结构与介电性能的影响 |
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| 引用本文： | 何世明,李言荣,刘兴钊.基片对SrTiO_3薄膜结构与介电性能的影响[J].电子元件与材料,2006,25(4):36-38. |
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| 作者姓名： | 何世明 李言荣 刘兴钊 |
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| 作者单位： | 电子科技大学微电子与固体电子学院,四川,成都,610054 |
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| 摘 要： | 对比研究了MgO和LaAlO3(LAO)单晶基片上采用脉冲激光法生长的SrTiO3(STO)薄膜的微观结构和介电性能。通过XRD,AFM和制备叉指电容测量的方法研究发现,在MgO基片上生长高质量(00L)织构STO薄膜需要较高的生长温度;LAO基片上的STO薄膜更加平整;而MgO上的STO薄膜具有更高的零偏压介电常数和更强的非线性介电性质。
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| 关 键 词： | 无机非金属材料 SrTiO3薄膜 基片 微观结构 介电性能 |
| 文章编号： | 1001-2028（2006）04-0036-03 |
| 收稿时间： | 2005-11-08 |
| 修稿时间： | 2005-11-08 |
Effect of Substrate on the Microstructure and Dielectric Properties of SrTiO3 Thin Films |
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| HE Shi-ming,LI Yan-rong,LIU Xing-zhao.Effect of Substrate on the Microstructure and Dielectric Properties of SrTiO3 Thin Films[J].Electronic Components & Materials,2006,25(4):36-38. |
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| Authors: | HE Shi-ming LI Yan-rong LIU Xing-zhao |
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| Affiliation: | Institute of Microelectronics and Solid State Electronics, University of Electronic Science and Technology, Chengdu 610054, China |
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| Abstract: | SrTiO3(STO)thin films were deposited onto MgO and LaAlO3(LAO)single crystal substrate via pulsed laser deposition.The effect of these two substrates on the microstructure and dielectric properties of STO thin films were investigated by XRD,AFM and measuring the interdigital capacitor on the thin films.Higher growth temperature is needed to get high quality STO thin films on MgO than on LAO substrate,while smoother films are grown on LAO.The capacitance measurements show that STO thin films on MgO substrate have larger zero-bias dielectric constant and stronger nonlinear dielectric property. |
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| Keywords: | inorganic non-metallic materials SrTiO3 thin films substrate microstructure dielectric property |
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