Development of a digital control system for high-performance pneumatic servo valve |
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| Authors: | Takashi Miyajima Toshinori Fujita Kazutoshi Sakaki Kenji Kawashima Toshiharu Kagawa |
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| Affiliation: | aTokyo Institute of Technology, 4259 R2-46 Nagatsuda-chou, Midori-ku, Yokohama, Kanagawa 226-8503, Japan;bTokyo Denki University, 2-2 Kanda-Nishiki-cho, Chiyoda-ku, Tokyo 101-8457, Japan;cSumitomo Heavy Industries Ltd., 5-9-11 Kita-Shinagawa, Shinagawa-ku, Tokyo 141-8686, Japan;dPrecision and Intelligence Laboratory, Tokyo Institute of Technology, Japan |
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| Abstract: | Pneumatic servo systems are used in many fields, such as pneumatic robot systems or vibration isolation systems. To improve the controllability of the pneumatic servo system, a higher performance servo valve is needed.In the present paper, a pneumatic spool type servo valve having an air bearing and a high-resolution position sensor was developed. We attempted to achieve high-frequency, high-accuracy flow rate control by digitization of the controller. We present herein a control algorithm for digital control of this valve.The characteristics of this valve were measured and the natural frequency of the valve was clarified to be up to 300 Hz. The spool position accuracy and the dynamic characteristics of the developed servo valve are greatly improved compared to existing valves. |
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| Keywords: | Pneumatic servo valve Digital control Disturbance observer Calculation delay compensation |
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