Planar optical waveguides obtained in Z-cut LiNbO3 and LiTaO3 by proton exchange in LiHSO4 vapors

A new proton source – LiHSO₄ vapors at low temperature – was used in forming optical waveguides in LiNbO₃ and LiTaO₃. The proton-exchanged layers were investigated by mode spectroscopy and infrared absorption spectroscopy. An estimate of the optical losses and phase contents of the waveguides was made. The diffusion parameters were determined for both types of crystal, and were compared to those obtained when benzoic acid melt was used as a proton source. The results presented could contribute to the realization of waveguides with controled phase compositions. The method proposed allows the use of a very simple and safe chamber construction, and the production of low-loss waveguides in a single technological step.