氧流量对TiO_2薄膜光电性质的影响

采用直流反应磁控溅射法在FTO基底上制备了TiO2薄膜,研究了在不同氧流量条件下TiO2薄膜的拉曼光谱、表面形貌和透射光谱,并将TiO2薄膜用N719染料进行敏化,制备了染料敏化太阳电池,测试了电池的I-V特性曲线。实验结果表明:随着氧流量的增加,电池的短路电流和光电转换效率先增加而后降低,在15cm3时达到最大;薄膜为锐钛矿和金红石的混合晶体结构;氧流量对薄膜的表面形貌影响不大,薄膜都表现出疏松多孔的表面结构。

Influence of Oxygen Flux on Photoelectric Properties of TiO_2 Thin Film Prepared by DC Magnetron Sputtering

TiO_2 thin films were deposited on FTO substrates by DC reactive magnetron sputtering at different oxygen fluxes. The films were characterized by Raman spectroscopy, surface morphology and transmission spectra. I-V curve was tested for the dye-sensitized solar cells which were prepared with TiO_2 films sensitized by N719. The results show that with the increase of oxygen flux, the short-circuit photocurrent and the solar energy conversion efficiency (η) increase at first, but then decrease. And when the oxygen flux is 15 cm~3, both Jsc and η reaches a maximum. It is revealed that the TiO_2 thin films are the mixed phase of anatase and rutile, oxygen flux has little effect on the surface morphology and all films show loose and poriferous structure.