Structural, mechanical, and frictional properties of titanium nitride films exposed to continuous ion beam bombardment |
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| Authors: | I. G. Romanov I. N. Tsareva L. A. Krivina |
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| Affiliation: | (1) Nizhnii Novgorod Branch of the A. A. Blagonravov Institute of Mechanical Engineering, Russian Academy of Sciences, Nizhnii Novgorod |
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| Abstract: | The influence of low-dose (1014–1015 cm−2) ion bombardment on the structural, mechanical, and frictional properties of titanium nitride films has been studied and results are presented. It is shown that at these doses plastic deformation processes take place in the target material, which change the degree of crystallinity. By selecting the bombardment conditions, the properties of TiN films can be varied fairly widely. Pis’ma Zh. Tekh. Fiz. 24, 64–68 (February 12, 1998) |
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