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Development of new position sensitive electron multiplication device fabricated by LIGA process |
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| Authors: | M. Inoue D. Fukuda H. Takahashi M. Nakazawa J. Kawarabayashi Y. Hirata T. Numazawa T. Haga |
| Affiliation: | (1) Department of Quantum Engineering and Systems Science, University of Tokyo, Hongo 7-3-1, Bunkyo-ku, Tokyo 113-8656, Japan, JP;(2) Department of Nuclear Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8601, Japan, JP;(3) Sumitomo Electric Industries Ltd., Harima Science Garden City 1431-12, Kamigori, Hyogo 678-1201, Japan, JP |
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