Affiliation: | a Institute of Electrical Engineering of the Slovak Academy of Sciences, Bratislava, 841 04, Slovakia b International Laser Center, Bratislava, 841 04, Slovakia c Department of Microelectronics, Czech Technical University, Prague, 166 27, Czech Republic d Department of Mechanics, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava, 812 19, Slovakia |