| 工艺综合与响应表面法的应用 |
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| 引用本文： | 鲁勇,张文俊,郑期彤,李成,杨之廉. 工艺综合与响应表面法的应用[J]. 电子学报, 2002, 30(9): 1274-1277 |
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| 作者姓名： | 鲁勇 张文俊 郑期彤 李成 杨之廉 |
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| 作者单位： | 清华大学微电子学研究所,北京 100084 |
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| 摘 要： | 工艺综合是一种自顶向下的工艺、器件设计方法.MOSPAD软件系统是基于工艺综合的思想开发的工艺与器件辅助设计工具.本文通过使用MOSPAD系统,对工艺改进中的实际问题采用工艺综合的方法,确定正确的工艺条件.在工艺综合系统中使用响应表面法加快其综合的速度,并利用响应表面模型以分析工艺窗口造成的灵敏度问题.
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| 关 键 词： | 工艺综合 优化 响应表面法(RSM) 工艺窗口 |
| 文章编号： | 0372-2112(2002)09-1274-04 |
Usage of Process Synthesis and Response Surface Method |
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| LU Yong,ZHANG Wen-jun,ZHENG Qi-tong,LI Cheng,YANG Zhi-lian. Usage of Process Synthesis and Response Surface Method[J]. Acta Electronica Sinica, 2002, 30(9): 1274-1277 |
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| Authors: | LU Yong ZHANG Wen-jun ZHENG Qi-tong LI Cheng YANG Zhi-lian |
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| Affiliation: | Institute of Microelectronic of Tsinghua University,Beijing 100084 |
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| Abstract: | Process Synthesis is a new top-down design method of semiconductor device and process. MOSPAD software is a kind of TCAD tool, based on the process synthes is methodology. This paper introduced the usage of the process synthesis and Response Surface Method (RSM) by MOSPAD, which will provide the process conditions for the improvement of a Fab. . RSM speed up the synthesis , and will be used to analyse the sensitivity of the process window. |
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| Keywords: | process synthesis optimization response surface method (RSM) process window |
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