| MEMS质量流量计在城市天然气计量的应用 |
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| 引用本文： | 谭小平,吴德才,黄立基.MEMS质量流量计在城市天然气计量的应用[J].煤气与热力,2011,31(11):39-42. |
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| 作者姓名： | 谭小平 吴德才 黄立基 |
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| 作者单位： | 1. 重庆凯源石油天然气有限责任公司,重庆,400021
2. 矽翔微机电系统(上海)有限公司,上海,200233 |
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| 摘 要： | 介绍了微机械电子系统（MEMS）质量流量计的构造、工作原理、技术特性，探讨了MEMS质量流量计的校准、对前直管段的要求、可靠性和温度性能，实流检测及实际应用。膜式表和MEMS质量流量计的实际应用效果对比显示，MEMS质量流量计比膜式表测量相对误差小，始动流量小。
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| 关 键 词： | 微机械电子系统 质量流量计 膜式表 实流检测 |
Application of Mass Flowmeter with Micro-electro-mechanical System to City Natural Gas Metering |
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| TAN Xiaoping,WU Decai,HUANG Liji.Application of Mass Flowmeter with Micro-electro-mechanical System to City Natural Gas Metering[J].Gas & Heat,2011,31(11):39-42. |
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| Authors: | TAN Xiaoping WU Decai HUANG Liji |
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| Affiliation: | TAN Xiaoping, WU Decai, HUANG Liji |
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| Abstract: | The structure, working principle and technical features of mass flowmeter with micro-electro-mechanical system （MEMS） are introduced. The requirement for front straight pipe section, the reliability measurement and the practical application are discussed. tween diaphragm meter and mass flowmeter with MEMS calibration of mass flowmeter with MEMS, the and temperature performance, the actual flow The practical application effect comparison beshows that the relative measurement error and starting flow rate of mass flowmeter with MEMS are less than those of diaphragm meter |
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| Keywords: | micro-electro-meclhanical system （MEMS） mass flowmeter diaphragm meter actual flow measurement |
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